International Conference on Microelectronics, Nanoelectronics and Nanoengineering (ICMNN)

Bio-nanotechnology & hybrid bio/solid state devicesDevice characterization and modellingDevice physics and novel structuresDUV, immersion, EUV and X-ray lithographyDUV, VUV, EUV Lithography and MetrologyElectron and Ion Beam LithographyLithography and Related TechnologiesMaskless LithographyMEMS and Nanoelectronic DevicesMetrology and alignmentMicro and nano-scaled MEMSMicroelectronic Circuit DesignMicroelectronic Device Electrical and Reliability TestingMicroelectronic Device Processing and Process IntegrationMicrosystem Technology and MEMSMolecular and low-dimensional nano-electronicsNanodevicesNanoelectronicsNanofabrication for energy sourcesNano-fabrication techniquesNanoimprint lithography, embossing and soft lithographyNanoimprint, Nanoprint and Rising LithographyNanomagnetic devicesNanomaterialsNanometer scale photonic devicesNanoparticle synthesis and assemblyNano-particle, synthesis and assemblyNanotechnologyNano-ToolsNovel ultrahigh density data storage devicesOptoelectronicsOptical tweezersPackaging and surface mount technologyPhoton- and charged-particle opticsPlasma etching and depositionReliability and failure analysisResist Materials and ProcessingResists and resist processingSelf-assembly and directed self-assemblySemiconductor Packaging and ReliabilitySilicon optimizationSimulation and computer aided design for the Nanoscale EraSub-half wavelength "super resolution" optical lithography