International Conference on Microelectronics and Nanotechnology (ICMN)

Microelectronic Device Processing and Process IntegrationMicroelectronic Device Electrical and Reliability TestingSemiconductor Packaging and ReliabilityMicroelectronic Circuit DesignMEMS and Nanoelectronic DevicesDUV, immersion, EUV and X-ray lithographyElectron and ion beam lithographySub-half wavelength "super resolution" optical lithographyPhoton- and charged-particle opticsMetrology and alignmentResists and resist processingPlasma etching and depositionNano-fabrication techniquesMaskless LithographyNanoelectronicsNanomagnetic devicesNovel ultrahigh density data storage devicesNanoparticle synthesis and assemblyNanofabrication for energy sourcesAtomic and Molecular manipulationOptical tweezersSimulation and computer aided design for the Nanoscale EraNanometer scale photonic devicesMolecular and low-dimensional nano-electronicsBio-nanotechnology & hybrid bio/solid state devicesMicro and nano-scaled MEMSNano-particle, synthesis and assemblySelf-assembly and directed self-assemblyNanoimprint lithography, embossing and soft lithographyNanofabrication for energy sourcesLithography and Related TechnologiesDUV, VUV, EUV Lithography and MetrologyElectron and Ion Beam LithographyResist Materials and ProcessingNanotechnologyNanodevicesNanofabricationNanomaterialsNano-ToolsNanoimprint, Nanoprint and Rising LithographyBio MEMS, Lab on a ChipMicrosystem Technology and MEMS